High Sensitivity and Selectivity of Array Gas Sensor through Glancing Angle Deposition Method
نویسندگان
چکیده
منابع مشابه
Designing Nanostructures by Glancing Angle Deposition
Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nanorod arrays with different shapes, nanospring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional cap...
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Arrays of Ta nanorods were grown by glancing angle deposition GLAD onto honeycomb Cr nanodot patterns that were evaporated onto Si substrates through a self-assembled monolayer of SiO2 nanospheres. Statistical size analyses from arrays of rods with variable average length l and width w, with 210 nm l 650 nm and 109 nm w 304 nm, show that the distribution in w broadens with increasing l and decr...
متن کاملDevelopment of two-level porosity during glancing angle deposition
Porous Ta and Al layers that exhibit 280-nm-wide micropores, which are interconnected by 5–50-nm-wide nanopores, were grown by glancing angle deposition GLAD . The micropore nucleation is facilitated by patterning Si 001 substrates with inverted-pyramidal pit arrays using anisotropic etching through lithographic masks obtained by colloidal self-assembly. The microstructure consists of vertical ...
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As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au a...
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ژورنال
عنوان ژورنال: JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY
سال: 2020
ISSN: 1225-5475,2093-7563
DOI: 10.46670/jsst.2020.29.6.407